3 targets magnetron DC plasma sputtering pvd coating equipment
Contact Info
- Add:No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, , Henan, China, Zip: 450000
- Contact: jibin wang
- Tel:86 371 5519 9322
- Email:wjb@cykeyi.com
Other Products
Three targets DC magnetron sputtering coater CY-MSP300S-3DC
Three targets DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with 500W DC power supply. The DC power supply can be used for the preparation of metal film. The three targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, DC power supply and pulse power supply can be customized. Various types of power supply are available from 300W to 1000W in various specifications.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
Three targets DC magnetron sputtering coater application:
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, this three targets magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Three targets DC magnetron sputtering coater technical parameters:
|
Size |
φ185mm |
Temperature control accuracy |
±1℃ |
|
|
Heating temperature |
Max 500℃ |
Rotate speed |
1-20rpm adjustable |
|
|
Magnetron Sputtering target head |
Quantity |
2”×3 (1”,2” optional) |
Water chiller |
Circulating water chiller with flow rate of 10L/min |
|
Cooling mode |
Water cooling |
|
|
|
|
Vacuum chamber |
Chamber size |
φ300mm×300mm |
Watch window |
φ100mm |
|
Chamber material |
Stainless steel |
Opening mode |
Top cover open |
|
|
Mass flowmeter |
2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs) |
|||
|
Vacuum system |
Model |
CY-GZK103-A |
Pumping interface |
KF40 |
|
Molecular pump |
CY-600 |
Exhaust interface |
KF16 |
|
|
Backing pump |
rotary vane pump |
Vacuum measurement |
Compound vacuum gauge |
|
|
Ultimate vacuum |
1.0E-5Pa |
Power supply |
AC;220V 50/60Hz |
|
|
Pumping rate |
Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
|||
|
Power configuration |
Quantity |
DC power supply×3 |
Max output power |
DC 500 W |
|
Other parameters |
Supply voltage |
AC220V,50Hz |
Overall size |
600mm×650mm×1280mm |
|
Total power |
3KW |
Total Weight |
300kg |
|
Chat Now
潞城市|
新民市|
昌都县|
福建省|
临湘市|
司法|
三门县|
海门市|
阿城市|
临湘市|
同德县|
施秉县|
南昌市|
景德镇市|
西贡区|
五华县|
天柱县|
乌兰县|
如东县|
盱眙县|
丽水市|
合肥市|
宜兰县|
睢宁县|
太谷县|
黄平县|
松滋市|
许昌县|
寻乌县|
新乡市|
鹤峰县|
平度市|
五大连池市|
邢台市|
塘沽区|
华容县|
砀山县|
乐亭县|
安福县|
行唐县|
西昌市|