Semiconductor Material Dry Cleaning Machine V1000X

Price:100

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Brand:	雅馬拓YAMATO
Spec:	V1000X

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廣州金程科學(xué)儀器有限公司

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Add:廣州市天河區(qū)廣汕二路13號-327-1房, Zip: 510630
Contact: 譚真東
Tel:020-87031216
Email:13808866455@139.com

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Guangzhou Jincheng Scientific Instrument Co., Ltd. supplies Yamato YAMATO plasma cleaner models V1000/V1000X/V1000XS, featuring 13.56MHz high-frequency output and equipped with RIE/DP dual modes. Applications include ashing and etching of silicon wafers, substrate surface contamination treatment, IC/LED packaging, BGA/CSP substrate processing, dry cleaning of electronic materials for semiconductor-related components, removal of natural oxide films and organic matter, interfacial activation treatment, and surface contaminant removal.

Plasma CleanerFeatures:

Ashing and etching of silicon wafers.

Substrate surface contamination treatment.

IC/LED packaging, BGA/CSP substrate processing.

Dry cleaning of electronic materials for semiconductor-related components.

Removal of natural oxide films and organic matter.

Interfacial activation treatment.

Surface contaminant removal.

Plasma Cleaner Technical Parameters:

Model	V1000	V1000X	V1000XS
Plasma Mode	DP/RIE
High-Frequency Power Supply	13.56MHz
Output Power	1000W	1000&1500W
Effective Electrode Size	W280xD280mm	W300xD300mm	W400xD375mm
Electrode	Parallel Plate	Two-Stage Electrode (Independent)	Plate (Multi-Purpose)
Reaction Gas	Polymerization Controller 2 Systems (Gas Lines Installed Separately)
Vacuum Pump (Standard)	Approx. 1000L/min	Approx. 1500L/min	1000&1500L/min
Safety Devices	Door Detection Switch, Interlock Mechanism, Emergency Stop Switch, Over-Temperature Prevention Device, etc.

YamatoYAMATO Plasma Cleaner V1000/V1000X/V1000XS information is provided by Guangzhou Jincheng Scientific Instrument Co., Ltd. For more details about plasma cleaners, please feel free to contact us.