SJ6000 Laser Interferometer offers advantages such as high precision, high sensitivity, and non-contact measurement, making it widely applicable in engineering and scientific research. In engineering, it can measure mechanical properties like material deformation, vibration, and thermal expansion; in research, it is used for studying surface topography of optical components, 3D morphology of complex-shaped objects, and motion analysis. Utilizing a high-performance frequency-stabilized helium-neon laser and based on the Michelson interferometer principle, this instrument serves as a length standard and calibration tool in metrology. It is widely used in CNC machine tools, laser marking/cutting, coordinate measuring machines, vision systems, precision measurement, automation, robotics, 3D printing, and more.

Product Features

(1) Capable of high-precision measurement of geometric parameters such as linear displacement, angle, straightness, perpendicularity, parallelism, flatness, and rotational axis;

(2) Can inspect the linear positioning accuracy, repeat positioning accuracy, as well as pitch, yaw, straightness, and perpendicularity of guideways in precision motion equipment like CNC machine tools and CMMs;

(3) Enables measurement and calibration of machine tool rotary axes;

(4) Automatically generates error compensation tables based on user-defined compensation methods, providing a basis for equipment error correction;

(5) SJ6000 Laser Interferometer features dynamic measurement and analysis capabilities, including displacement, velocity, acceleration, amplitude, and frequency analysis, allowing for vibration analysis, dynamic characterization of ball screw guides, and drive system response analysis;

(6) Supports manual or automatic environmental compensation.

Product Configuration

The SJ6000 Laser Interferometer system includes a range of modular components that can be selected based on specific measurement needs. The main optical assemblies are listed below in order: linear mirror kit, angular mirror kit, straightness mirror kit, perpendicularity mirror kit, flatness mirror kit, and automatic precision rotary table.

Main Optical Assemblies Diagram

The linear mirror kit is standard and consists of a linear interferometer, linear reflector, and clamping hole base. It meets the requirements for measuring and analyzing positioning accuracy, repeat positioning accuracy, and backlash of linear displacement equipment, as well as backlash correction and pitch compensation.

Linear Measurement Configuration and Usage

The linear measurement (short for linear axis position accuracy measurement) configuration mainly comprises the SJ6000 main unit, EC20 environmental compensation unit, linear mirror kit, and SJ6000 static measurement software, supporting linear measurements within a range of 0–80 m. Linear measurements include positioning accuracy, repeat positioning accuracy, and equipment backlash measurement.

The SJ6000 static measurement software can generate error compensation tables from linear measurement results. These tables include compensation values for each measurement point, allowing motion control system manufacturers to reduce position errors of motion axes by modifying compensation values. Precise compensation effectively minimizes position errors.

Data acquisition for target positions in linear measurement can be position-based or time-based. The position-based method is commonly used, where the measured motion axis is set with several equidistant positioning points. When the axis moves to a set point, a dwell time is required to allow the SJ6000 measurement software to collect data at that point.

Linear Measurement Applications

The SJ6000 Laser Interferometer is widely used for linear measurement in machine tools, CMMs, robotics, 3D printing equipment, automation systems, linear displacement stages, precision machinery, and precision inspection instruments.

SJ6000 Laser Interferometer is centered on interferometry technology, with light waves that can directly define the meter. It employs laser dual-longitudinal-mode thermal frequency stabilization technology to achieve high-precision, anti-interference, and long-term stable laser frequency output. A high-precision environmental compensation module enables automatic compensation for laser wavelength and material properties. The interferometer is designed separately from the main unit to avoid thermal effects on the optics, ensuring stable and reliable interferometric light paths.