— The Preferred Choice for Supporting Customers in Industries with Higher Demands for Control Accuracy and Repeatability

The E400 Series Yidu Intelligent Laminar Flow Differential Pressure 70+ Gas and Mixed Gas Mass Flow Controller MFC demonstrates outstanding performance in low zero point, temperature, and pressure drift through precise compensation from built-in pressure and temperature sensors and core algorithms. Its robust metal housing ensures durability and strong resistance to electromagnetic interference in complex industrial environments. Additionally, it features built-in settings for multiple gases and mixed gases, along with digital and analog communication methods, enabling precise flow measurement and control.

Flow Range: 0.5 sccm ~ 5000 slpm

Features:

l Principle: Laminar Flow Differential Pressure Flow Meter

l High Accuracy: ±0.5% of set value

l High Repeatability: ±0.1% F.S.

l Wide Temperature and Pressure Range: -20°C ~ 60°C, within 1 MPa

l Standard: Digital Signal RS485; Optional: Analog Signal 0-20mA or 0~5V

l Built-in Measurement for 70 Gases and Mixed Gases

l PC Software Provided for Real-Time Display and Data Download

Usage Conditions:

l Compatible with Built-in 70 Gases and Editable Mixed Gases

l Valve Type: N/C (Normally Closed)

l Operating Flow Range: 1% ~ 120% F.S.

l Medium Temperature: -20°C ~ 60°C

l Ambient Temperature: -20°C ~ 50°C

l Operating Humidity: 0% ~ 98% (Non-Condensing)

l Operating Differential Pressure Range: 100 kPa ~ 700 kPa

l Operating Pressure: 1 MPa

l Withstand Pressure: 1.5 MPa

l Power Supply Voltage: ﹢(19~29) VDC

l Current Consumption: <150 mA (at 24V power supply), <300 mA (<5V)

l Installation Method: Any Angle

l Inlet/Outlet: Pipe Thread (Internal Thread)

l Gas Contact Material: SUS304, SUS316L

l Gas Contact Seal Material: O-ring Seal: Fluororubber

Application Scenarios

l Flow Control Components in Optical and Atomic Coating Equipment

l Integration and Support for Flow Control Systems in Manufacturing Equipment

l Flow Control Components in Fine Chemical Production Lines

l Flow Control Components in Bioreactor Complete Equipment

l Flow Control Components in Gas Distribution Systems or Devices

l Flow Control Components in Analytical Instruments and Scientific Instruments

l Flow Control Components in Customized Complete Automation Equipment

The E400 Series Yidu Intelligent Laminar Flow Differential Pressure 70+ Gas and Mixed Gas Mass Flow Controller MFC is suitable for supporting users with higher requirements for accuracy and repeatability.