I. Mechanical Applications

Used for producing IR-CUT filters, dichroic filters, high-reflection coatings, AR coatings, long-pass filters, short-pass filters, and various electrical thin films.

II. Mechanical Advantages

Adopts a box structure with a rear-mounted vacuum system for easy operation and maintenance; the entire machine has a smooth surface for easy cleaning, making it particularly suitable for cleanroom installation as a through-wall type.

Sales Technical Manager Yang: 181-030-45976

III. Features

Vacuum chamber size: Φ600-1800mm; 60-point/80-point optical thickness monitoring; uses an ion source with uniformly distributed high ion current density; equipped with dual electron guns; multiple-point and ring-type crucibles capable of coating over 100 layers; fully automated coating process using an automatic evaporation control system; workpiece holder options include bell jar or planetary types; exhaust system options include diffusion pump + cryocondensation pump (POLYCOLD) or condensation pump; specification equipment name.

IV. Specifications

OTFC-1300CBI/DBI vacuum chamber: SUS304, φ1300mm×1610mm (H); workpiece holder: φ1130mm; workpiece holder rotation speed: 10rpm to 50rpm (variable); optical thickness control: HOM2-R-VIS350A optical thickness monitor.

Wavelength range: 350nm to 1100nm

Reflective/transmissive crystal thickness gauge: XTC/3+6-point crystal sensor; evaporation source: 2 sets of electron guns; ion source: 17cm RF ion source; exhaust system: mechanical pump + 2 diffusion pumps + Polycold (or 2 condensation pumps).

V. Performance

Achieves pressure below 7.0×10?? Pa; exhaust time: 15 minutes (from atmospheric pressure to 1.3×10?3 Pa); maximum substrate temperature: 350°C; operating conditions: equipment dimensions approximately 5000mm (W) × 6500mm (D) × 3500mm (H); power supply: 3-phase, 200V, 50/60Hz, approximately 104KVA; water flow rate: 140 liters/min or above; air pressure: 0.5MPa or above; weight: approximately 8500kg.

Inventory Details: