Detailed Introduction:

NO 2017 2019

EB (Electron Gun) 1GUN. Hanil 12 Six

Higher than source Hanil. (Hall)

Chamber Pump Edwards EM275

Roughing System Edwards EM2600

Cryopump Korea V-PLUS1000H

Quality Control XTC + 2 Quality Controls

Resistance Evaporation 1 unit

Ensuring Film Uniformity and Repeatability

Utilizes variable correction plates based on material evaporation characteristics to ensure overall dome uniformity, with no variation in quality between batches.

Simplicity

Even inexperienced operators can use it. Projects can be controlled according to user requirements, displaying causes and solutions when malfunctions occur.

Process Management Provided

Provides Process recipe and Data Logging, making it easy to manage processes and quality.

Mass Production Support

Thorough acceptance testing based on standards ensures delivered equipment reflects customer requirements, enabling mass production shortly after installation.

Cover Glass Insertion Quantity